|Ellipsometer and Ellipsometry Resources
Spectroscopic ellipsometer can be used It is used for the following measurements:
-Thickness of films.
-Modeling of surface roughness.
-Analysis is less sensitive to the fluctuations of light intensity
-Analysis of films doesn't require contact with the films
-Analysis doesn't need a reference or standard sample
-Analysis shows both phase and amplitude ratio of a sample
HOW DOES SPECTROSCOPIC ELLIPSOMETRY WORK?
Spectroscopic Ellipsometry is a well known ,non-destructive ,precise, accurate analytical technique used to determine thickness of films and optical properties.
1-Light is shined from a light source.
2-The light is polarized by passing through a linear polarizer.
3-The light is then elliptically polarized by passing through a compensator.
4-The hits the sample, is reflected and is linearly polarized.
5-The analyzer detects the change of polarization.
6-The detector catches the light and send it to the computer to process the data.
7-The measured data combined with computerized optical modeling gives information of the film thickness and refractive index values of a sample.